Introductory MEMS fabrication and applications

By:

Adams, Thomas M

Contributor(s):

Layton, Richard A

Material type: Text

TextPublisher number: 12102532Publication details: New York : Springer, c2010.Description: xv, 444 p.; 22 cmISBN:

9788132206637

Subject(s):

DDC classification:

621.381 22 ADA-I

LOC classification:

TK7875 .A33 2010
TK7875

Other classification:

ZN 3750

Contents:

1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.

SpringerLink ebooks - Engineering (2010)

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Holdings
Item type	Current library	Collection	Call number	Status	Date due	Barcode	Item holds
Books	IIITD General Stacks	Electronics and Communication Engineering	621.381 ADA-I (Browse shelf(Opens below))	Available		002501