MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01712cam a22004097a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
8570834 |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20170731125145.0 |
| 006 - FIXED-LENGTH DATA ELEMENTS--ADDITIONAL MATERIAL CHARACTERISTICS--GENERAL INFORMATION |
|---|
| fixed length control field |
m d |
| 007 - PHYSICAL DESCRIPTION FIXED FIELD--GENERAL INFORMATION |
|---|
| fixed length control field |
cr n |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
820204s2010 nyua sb 001 0 eng d |
| 015 ## - NATIONAL BIBLIOGRAPHY NUMBER |
|---|
| National bibliography number |
08,N20,0973 |
| Source |
dnb |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9788132206637 |
| 028 52 - PUBLISHER NUMBER |
|---|
| Publisher number |
12102532 |
| 035 ## - SYSTEM CONTROL NUMBER |
|---|
| System control number |
(WaSeSS)ssj0000449744 |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
ITD |
| Transcribing agency |
ITD |
| Modifying agency |
ITD |
| -- |
AU@ |
| -- |
BWX |
| -- |
SINLB |
| -- |
YDXCP |
| -- |
MUU |
| -- |
DEBBG |
| -- |
GZQ |
| -- |
VRC |
| -- |
DLC |
| -- |
WaSeSS |
| 042 ## - AUTHENTICATION CODE |
|---|
| Authentication code |
lccopycat |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7875 |
| Item number |
.A33 2010 |
| 050 #4 - LIBRARY OF CONGRESS CALL NUMBER |
|---|
| Classification number |
TK7875 |
| 082 04 - DEWEY DECIMAL CLASSIFICATION NUMBER |
|---|
| Classification number |
621.381 |
| Edition number |
22 |
| Item number |
ADA-I |
| 084 ## - OTHER CLASSIFICATION NUMBER |
|---|
| Classification number |
ZN 3750 |
| Source of number |
rvk |
| 100 1# - MAIN ENTRY--PERSONAL NAME |
|---|
| Personal name |
Adams, Thomas M. |
| 210 10 - ABBREVIATED TITLE |
|---|
| Abbreviated title |
Introductory MEMS |
| 245 10 - TITLE STATEMENT |
|---|
| Title |
Introductory MEMS |
| Remainder of title |
fabrication and applications |
| Statement of responsibility, etc |
Thomas M. Adams, Richard A. Layton. |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) |
|---|
| Place of publication, distribution, etc |
New York : |
| Name of publisher, distributor, etc |
Springer, |
| Date of publication, distribution, etc |
c2010. |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xv, 444 p.; |
| Dimensions |
22 cm. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc |
Includes bibliographical references and index. |
| 505 0# - FORMATTED CONTENTS NOTE |
|---|
| Formatted contents note |
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories. |
| 506 ## - RESTRICTIONS ON ACCESS NOTE |
|---|
| Terms governing access |
License restrictions may limit access. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Microelectromechanical systems. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Electronic apparatus and appliances. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
Transducers. |
| 650 07 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name as entry element |
MEMS. |
| Source of heading or term |
swd |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Layton, Richard A. |
| 773 #0 - HOST ITEM ENTRY |
|---|
| Title |
SpringerLink ebooks - Engineering (2010) |
| 910 ## - USER-OPTION DATA (OCLC) |
|---|
| User-option data |
Library of Congress record |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) |
|---|
| Source of classification or shelving scheme |
Dewey Decimal Classification |
| Item type |
Books |
