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Adams, Thomas M.

Introductory MEMS fabrication and applications Thomas M. Adams, Richard A. Layton. - New York : Springer, c2010. - xv, 444 p.; 22 cm.

Includes bibliographical references and index.

1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.

License restrictions may limit access.

9788132206637 = Introductory MEMS

12102532

08,N20,0973 dnb


Microelectromechanical systems.
Electronic apparatus and appliances.
Transducers.
MEMS.

TK7875 / .A33 2010 TK7875

621.381 / ADA-I

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