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1. Guide to hands-on MEMS design and prototyping

by Kubby, Joel A.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: Cambridge, UK ; New York : Cambridge University Press, 2011Online access: Cover image Availability: Items available for loan: IIITD [REF 621.381 KUB-G] (1).

2. Introductory MEMS fabrication and applications

by Adams, Thomas M | Layton, Richard A.

Source: SpringerLink ebooks - Engineering (2010)Material type: book Book; Format: electronic available online remote; Literary form: not fiction Publisher: New York : Springer, c2010Availability: Items available for loan: IIITD [621.381 ADA-I] (1).

3. Microsystem design

by Senturia, Stephen D.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: Boston : Kluwer Academic Publishers, 2001Online access: Publisher description | Table of contents only Availability: Items available for loan: IIITD [621.381 SEN-M] (1).

4. Micro and smart systems

by Ananthasuresh, G.K.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: New Delhi : Wiley, c2010Availability: Items available for loan: IIITD [621.381 ANA-M] (1).

5. MEMS and NEMS : systems, devices, and structures

by Lyshevski, Sergey Edward.

Material type: book Book; Format: print ; Literary form: not fiction Publisher: New Delhi. : CRC Press, c2002Online access: Publisher description Availability: Items available for loan: IIITD [621.381 LYS-M] (1).


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