Introductory MEMS fabrication and applications
Material type: TextPublisher number: 12102532Publication details: New York : Springer, c2010.Description: xv, 444 p.; 22 cmISBN:- 9788132206637
- 621.381 22 ADA-I
- TK7875 .A33 2010
- TK7875
- ZN 3750
Item type | Current library | Collection | Call number | Status | Date due | Barcode | Item holds |
---|---|---|---|---|---|---|---|
Books | IIITD General Stacks | Electronics and Communication Engineering | 621.381 ADA-I (Browse shelf(Opens below)) | Available | 002501 |
Includes bibliographical references and index.
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
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