| 000 | 01100cam a22002894a 4500 | ||
|---|---|---|---|
| 001 | 12547484 | ||
| 003 | IIITD | ||
| 005 | 20140716152328.0 | ||
| 008 | 010927s2002 flua b 001 0 eng | ||
| 010 | _a 2001049944 | ||
| 020 | _a9780849312625 | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.L9597 2002 |
| 082 | 0 | 0 |
_a621.381 _221 _bLYS-M |
| 100 | 1 | _aLyshevski, Sergey Edward. | |
| 245 | 1 | 0 |
_aMEMS and NEMS : _bsystems, devices, and structures _cSergey Edward Lyshevski. |
| 260 |
_aNew Delhi. : _bCRC Press, _cc2002. |
||
| 300 |
_a461 p. : _bill. ; _c25 cm. |
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| 440 | 0 | _aNano- and microscience, engineering, technology, and medicine series | |
| 504 | _aIncludes bibliographical references and index. | ||
| 650 | 0 | _aMicroelectromechanical systems. | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0646/2001049944-d.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c8553 _d8553 |
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