| 000 | 01262cam a22003014a 4500 | ||
|---|---|---|---|
| 001 | 12181154 | ||
| 005 | 20170731140307.0 | ||
| 008 | 000921s2001 maua b 001 0 eng | ||
| 010 | _a 00048768 | ||
| 020 | _a9788181285461 | ||
| 040 |
_aDLC _cDLC _dDLC |
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| 042 | _apcc | ||
| 050 | 0 | 0 |
_aTK7875 _b.S46 2000 |
| 082 | 0 | 0 |
_a621.381 _221 _bSEN-M |
| 100 | 1 | _aSenturia, Stephen D. | |
| 245 | 1 | 0 |
_aMicrosystem design _cStephen D. Senturia. |
| 260 |
_aBoston : _bKluwer Academic Publishers, _c2001. |
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| 300 |
_axxvi, 689 p. : _bill. ; _c24 cm. |
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| 504 | _aIncludes bibliographical references (p. [665]-676) and index. | ||
| 650 | 0 |
_aMicroelectromechanical systems _xDesign and construction. |
|
| 650 | 0 | _aSystem design. | |
| 650 | 0 | _aMicroelectronics. | |
| 856 | 4 | 2 |
_3Publisher description _uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-d.html |
| 856 | 4 | 1 |
_3Table of contents only _uhttp://www.loc.gov/catdir/enhancements/fy0821/00048768-t.html |
| 906 |
_a7 _bcbc _corignew _d1 _eocip _f20 _gy-gencatlg |
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| 942 |
_2ddc _cBK |
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| 999 |
_c8343 _d8343 |
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