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020 _a9788126532605
040 _aIIITD
082 _a621.38
_bMAY-F
100 _aMay, Gary S.
245 _aFundamentals of semiconductor fabrication
_cby Gary S. May and Simon M. Sze
260 _bWiley,
_aNew Delhi :
_c©2004
300 _axiii, 305 p. :
_bill. ;
_c24 cm.
500 _aThis book includes index.
650 _aSemiconductors
650 _aIntegrated circuits
650 _aDesign and construction
700 _aM. Sze, Simon
942 _2ddc
_cREF
999 _c170671
_d170671