000			00744nam a22002417a 4500
003			IIITD
005			20201204120601.0
008			201204b xxu||||| |||| 00| 0 eng d
020			_a9780201444940
040			_aIIITD
082			_a621.381 _bJAE-I
100			_aJaeger, Richard C.
245			_aIntroduction to microelectronic fabrication _cby Richard C. Jaeger
250			_a2nd ed.
260			_bPrentice Hall, _aNew Jersey : _c©2002
300			_axiv, 316 p. : _bill. ; _c24 cm
440			_aModular series on solid state devices _v5
500			_aThis book includes bibliographic references and index.
650			_aIntegrated circuits
650			_aCircuit-Design and construction
650			_aLithography
942			_2ddc _cBK
999			_c156127 _d156127