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	1.	Guide to hands-on MEMS design and prototyping by Kubby, Joel A Material type: Text; Format: print ; Literary form: Not fiction Publication details: Cambridge, UK ; New York : Cambridge University Press, 2011 Online access: Cover image Availability: Items available for loan: IIITD (1)Call number: REF 621.381 KUB-G. Place hold Add to cart (remove)
	2.	Introductory MEMS fabrication and applications by Adams, Thomas M Layton, Richard A Material type: Text; Format: electronic available online ; Literary form: Not fiction Publisher number: 12102532 Publication details: New York : Springer, c2010 SpringerLink ebooks - Engineering (2010) Availability: Items available for loan: IIITD (1)Call number: 621.381 ADA-I. Place hold Add to cart (remove)
	3.	Microsystem design by Senturia, Stephen D Material type: Text; Format: print ; Literary form: Not fiction Publication details: Boston : Kluwer Academic Publishers, 2001 Online access: Publisher description Table of contents only Availability: Items available for loan: IIITD (1)Call number: 621.381 SEN-M. Place hold Add to cart (remove)
	4.	Micro and smart systems by Ananthasuresh, G.K Material type: Text; Format: print ; Literary form: Not fiction Publication details: New Delhi : Wiley, c2010 Availability: Items available for loan: IIITD (1)Call number: 621.381 ANA-M. Place hold Add to cart (remove)
	5.	MEMS and NEMS : systems, devices, and structures by Lyshevski, Sergey Edward Series: Nano- and microscience, engineering, technology, and medicine series Material type: Text; Format: print ; Literary form: Not fiction Publication details: New Delhi. : CRC Press, c2002 Online access: Publisher description Availability: Items available for loan: IIITD (1)Call number: 621.381 LYS-M. Place hold Add to cart (remove)

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