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Introductory MEMS fabrication and applications

By: Adams, Thomas M.
Contributor(s): Layton, Richard A.
Material type: materialTypeLabelBookPublisher: New York : Springer, c2010Description: xv, 444 p.; 22 cm.ISBN: 9788132206637.Subject(s): Microelectromechanical systems | Electronic apparatus and appliances | Transducers | MEMS
Contents:
1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.
SpringerLink ebooks - Engineering (2010)
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Electronics and Communication Engineering 621.381 ADA-I (Browse shelf) Available 002501
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621.3804 OPP-D Discrete-time signal processing 621.381 Electronics for you plus 621.381 ACH-F Fundamentals of semiconductor devices 621.381 ADA-I Introductory MEMS 621.381 AGA-F Foundations of analog and digital electronic circuits 621.381 AGA-F Foundations of analog and digital electronic circuits 621.381 ALI-E Electronic engineering materials and devices

Includes bibliographical references and index.

1. Introduction -- 2. The substrate and adding material to it -- 3. Creating and transferring patterns- photolithography -- 4. Creating structures - micromachining -- 5. Solid mechanics -- 6. Thinking about modeling -- 7. MEMS transducers -- 8. Piezoresistive transducers -- 9. Capacitive transducers -- 10. Piezoelectric transducers -- 11. Thermal transducers -- 12. Introduction to microfluidics -- 13. Microfabrication laboratories.

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