MEMS and NEMS :
Lyshevski, Sergey Edward.
MEMS and NEMS : systems, devices, and structures Sergey Edward Lyshevski. - New Delhi. : CRC Press, c2002. - 461 p. : ill. ; 25 cm. - Nano- and microscience, engineering, technology, and medicine series .
Includes bibliographical references and index.
9780849312625
2001049944
Microelectromechanical systems.
TK7875 / .L9597 2002
621.381 / LYS-M
MEMS and NEMS : systems, devices, and structures Sergey Edward Lyshevski. - New Delhi. : CRC Press, c2002. - 461 p. : ill. ; 25 cm. - Nano- and microscience, engineering, technology, and medicine series .
Includes bibliographical references and index.
9780849312625
2001049944
Microelectromechanical systems.
TK7875 / .L9597 2002
621.381 / LYS-M