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Microsystem design

Senturia, Stephen D.

Microsystem design Stephen D. Senturia. - Boston : Kluwer Academic Publishers, 2001. - xxvi, 689 p. : ill. ; 24 cm.

Includes bibliographical references (p. [665]-676) and index.

ISBN: 9788181285461

LCCN: 00048768

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
System design.
Microelectronics.

LC Class. No.: TK7875 / .S46 2000

Dewey Class. No.: 621.381 / SEN-M

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