Introduction to microelectronic fabrication
Jaeger, Richard C.
Introduction to microelectronic fabrication by Richard C. Jaeger - 2nd ed. - New Jersey : Prentice Hall, ©2002 - xiv, 316 p. : ill. ; 24 cm - Modular series on solid state devices 5 .
This book includes bibliographic references and index.
9780201444940
Integrated circuits
Circuit-Design and construction
Lithography
621.381 / JAE-I
Introduction to microelectronic fabrication by Richard C. Jaeger - 2nd ed. - New Jersey : Prentice Hall, ©2002 - xiv, 316 p. : ill. ; 24 cm - Modular series on solid state devices 5 .
This book includes bibliographic references and index.
9780201444940
Integrated circuits
Circuit-Design and construction
Lithography
621.381 / JAE-I